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Femtosecond laser one-step direct-writing cylindrical microlens array on fused silica

Abstract

We demonstrate an efficient method for fabricating high-quality cylindrical microlens arrays (CMLAs) on the surface of fused silica, fully based on spatially shaping of a femtosecond laser beam from Gaussian to Bessel distribution. As the envelope of shaped spatial intensity distribution matches the profile of cylindrical microlens perfectly, a CMLA with more than 50 uniform microlenses is fabricated by simple line scanning. The radius and height of these microlens units can be finely controlled by adjusting the power of laser pulses. Excellent optical imaging and high-speed fabrication performances are also demonstrated by our fabricated CLMA.

© 2017 Optical Society of America

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