Abstract

Non-polar ZnO thin films are grown on m-plane sapphire substrates by plasma-assisted molecular beam epitaxy. Emission enhancement from non-polar ZnO thin films coated with $\mathrm{Al}/{\mathrm{AlO}}_x$ has been studied by photoluminescence spectroscopy. ${\mathrm{AlO}}_x$ has been used to mediate the surface plasmon (SP) energy of Al nanoparticles. Taking advantage of the resonant coupling between the UV emission of non-polar ZnO film and Al nanoparticle SPs, an 84-fold enhancement of the UV emission and an 8.3-fold enhancement of internal quantum efficiency (${\eta }_{\mathrm{int}}$) have been achieved under the optimized sputtering time and energy of SPs.

© 2018 Optical Society of America

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