Abstract

In this Letter, parallel writing of silver microwire (AgMW) arrays based on femtosecond laser multiphoton reduction (MPR) is realized by modulating a femtosecond laser beam into a multifoci pattern with a spatial light modulator (SLM). Arbitrarily distributed multifoci are generated with predesigned holograms loaded on a SLM for MPR. The experimental parameters for the desired fabrication of AgMWs with multifoci are systematically investigated and optimized. On this basis, different AgMW patterns are dynamically and simultaneously fabricated by loading different holograms onto a high-frequency refreshed SLM in sequence. The quantity and distribution of multifoci can be controlled dynamically by the SLM in the fabrication process, and even the intensity of individual focus is dynamically modulated by the control of the gray level of holograms. Finally, the potential application of this flexible and rapid AgMW fabrication method in microheater fabrication is demonstrated. The microheaters exhibit a controllable temperature gradient after energized.

© 2018 Optical Society of America

Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

Chenchu Zhang, Jianming Zhang, Renfei Chen, Jiawen Li, Chaowei Wang, Rui Cao, Jingjing Zhang, Hanchang Ye, Hua Zhai, and Koji Sugioka
Opt. Lett. 45(14) 3929-3932 (2020)

Self-assembled micropillars fabricated by holographic femtosecond multi-foci beams forin situ trapping of microparticles

Yanlei Hu, Wenfei Feng, Cheng Xue, Zhaoxin Lao, Shengyun Ji, Ze Cai, Wulin Zhu, Jiawen Li, Dong Wu, and Jiaru Chu
Opt. Lett. 45(17) 4698-4701 (2020)

Maskless fabrication of plasmonic metasurfaces in polymer film using a spatial light modulator

Mohammad H. Bitarafan, Shambhavee Annurakshita, Juha Toivonen, and Godofredo Bautista
Opt. Lett. 46(6) 1197-1200 (2021)

Photoluminescence in hexagonal silicon carbide by direct femtosecond laser writing

S. Castelletto, A. F. M. Almutairi, K. Kumagai, T. Katkus, Y. Hayasaki, B. C. Johnson, and S. Juodkazis
Opt. Lett. 43(24) 6077-6080 (2018)

Fabrication of computer-generated holograms using femtosecond laser direct writing

René Berlich, Daniel Richter, Martin Richardson, and Stefan Nolte
Opt. Lett. 41(8) 1752-1755 (2016)