Abstract
A highly sensitive ultrasound sensor based on an integrated photonics Mach–Zehnder interferometer (MZI) fabricated in silicon-on-insulator technology is reported. The sensing spiral is located on a membrane of size . Ultrasound waves excite the membrane’s vibrational mode, which translates to modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a bandwidth of 21.2%. The sensor sensitivity is linear in the optical input power and reaches a maximum 0.62 mV/Pa, which is limited by the interrogation method. At 0.47 MHz and for an optical power of 1.0 mW the detection limit is and the dynamic range is 59 dB. The MZI’s gradual transmission function allows a wide range of wavelength operation points. This strongly facilitates sensor use and is promising for applications.
© 2019 Optical Society of America
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