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Compact diaphragm-based optical accelerometers with µg/$\surd$Hz resolution

Abstract

A compact fiber accelerometer that meets the resolution requirement for aircraft navigation is reported. It detects extremely weak acceleration-induced vibrations of a spring-loaded diaphragm using a two-wave interferometer with a $\pi /2$ biasing step micro-fabricated on the diaphragm. A single-mode fiber provides a laser beam that interrogates the interferometer. This sensor has a measured flat-band sensitivity with a bandwidth of 10.7 kHz, and a resolution limited by thermo-mechanical noise of $13\;\unicode{x00B5}{\rm g}/\surd {\rm Hz}$ at 100 Torr, and $712\;{\rm ng}/\surd {\rm Hz}$ at 20 mTorr.

© 2020 Optical Society of America

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