Abstract

We fabricate 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. The array consists of periodical hexagonal plano-convex microlens units with a diameter of 9 µm. The focusing efficiency of each microlens is measured to be 92%. Combined with a CCD camera, the MLA works as a Shack–Hartmann wavefront sensor. We use it to detect wavefronts of both oblique incident plane beams and vortex beams. The experimental results match well with theoretical ones.

© 2020 Optical Society of America

Convex silica microlens arrays via femtosecond laser writing

Jian-Guan Hua, Hang Ren, Ao Jia, Zhen-Nan Tian, Lei Wang, Saulius Juodkazis, Qi-Dai Chen, and Hong-Bo Sun
Opt. Lett. 45(3) 636-639 (2020)

Single-shot ultrafast burst imaging using an integral field spectroscope with a microlens array

Hirofumi Nemoto, Takakazu Suzuki, and Fumihiko Kannari
Opt. Lett. 45(18) 5004-5007 (2020)

Quadrant Fourier transform and its application in decoding OAM signals

Chensheng Wu, Daniel A. Paulson, and Christopher C. Davis
Opt. Lett. 45(16) 4428-4431 (2020)

Fabrication of high fill factor cylindrical microlens array with isolated thermal reflow

Jinfeng Qiu, Mujun Li, Huichun Ye, Chen Yang, and Cuicui Shi
Appl. Opt. 57(25) 7296-7302 (2018)

Rapid fabrication of large-area concave microlens arrays on silica glasses by femtosecond laser bursts

Quanji Wang, Shaorui Yang, Zijing Yang, Jun Duan, Wei Xiong, and Leimin Deng
Opt. Lett. 47(15) 3936-3939 (2022)