On-chip high-sensitivity photonic temperature sensor based on a GaAs microresonator

Yongchao Chen; Jianping Li; Jianping Li; Xiaojie Guo; Lei Wan; Jin Liu; Zhenshi Chen; Jingshun Pan; Bin Zhang; Zhaohui Li; Zhaohui Li; Zhaohui Li; Yuwen Qin

doi:10.1364/OL.399397

Optics Letters
Vol. 45,
Issue 18,
pp. 5105-5108
(2020)
•https://doi.org/10.1364/OL.399397

On-chip high-sensitivity photonic temperature sensor based on a GaAs microresonator

Yongchao Chen, Jianping Li, Xiaojie Guo, Lei Wan, Jin Liu, Zhenshi Chen, Jingshun Pan, Bin Zhang, Zhaohui Li, and Yuwen Qin

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Yongchao Chen, Jianping Li, Xiaojie Guo, Lei Wan, Jin Liu, Zhenshi Chen, Jingshun Pan, Bin Zhang, Zhaohui Li, and Yuwen Qin, "On-chip high-sensitivity photonic temperature sensor based on a GaAs microresonator," Opt. Lett. 45, 5105-5108 (2020)

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- Optical Sensors, Measurements, and Metrology
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About this Article
History
- Original Manuscript: June 3, 2020
- Revised Manuscript: July 28, 2020
- Manuscript Accepted: July 31, 2020
- Published: September 10, 2020

Abstract

We demonstrate an on-chip high-sensitivity photonic temperature sensor based on a GaAs microdisk resonator. Based on the large thermo-optic coefficient of GaAs, a temperature sensitivity of 0.142 nm/K with a measurement resolution of 10 mK and low input optical power of only 0.5 µW was achieved. It exhibits great potential for chip-scale biological research and integrated photonic signal processing.

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Material	$C_{TOC}$ ( $K^{- 1}$ )	$C_{CTE}$ ( $K^{- 1}$ )	Sensitivity (nm/K)
Lithium Niobate [16]	$1.22 \times 10^{- 5}$	$3.34 \times 10^{- 5}$	0.006
Silica [29]	$8.52 \times 10^{- 6}$	$0.55 \times 10^{- 6}$	0.015
Silicon [14]	$2 \times 10^{- 4}$	$3.57 \times 10^{- 6} K^{- 1}$	0.077
This work	$2.35 \times 10^{- 4}$	$5.73 \times 10^{- 6} K^{- 1}$	0.142
Polymer [9]	$- 1.8 \times 10^{- 4}$	$2.7 \times 10^{- 4}$	0.151
Silik [17]	$2.4 \times 10^{- 4}$	$- 10.6 \times 10^{- 4}$	1.170

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