Abstract

A nanosecond-millisecond combined pulse laser (CPL) drilling method was proposed for drilling alumina ceramic. The total energy consumption of the CPL drilling was 1/7 of that of a conventional millisecond laser, and the drilling quality was better. The simulation results demonstrated that, due to the nonuniform reflection of the millisecond laser in the keyhole, the ellipse keyhole ablated by the off-axis incident nanosecond pulses had no effect on the circularity of the through hole. In addition, the multireflection of the laser in the keyhole enhanced the absorption, so the keyhole ablated by the nanosecond pulses could be used as a target for limiting the absorption of the subsequent millisecond pulses. In this context, the keyhole could be used to reduce the hole diameter if the subsequent millisecond laser had a bigger spot size, and this CPL drilling method could be used as an effective group hole drilling method.

© 2020 Optical Society of America

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