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Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform

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Abstract

Wavelength-sized microdisk resonators were fabricated on a single crystalline 4H-silicon-carbide-on-insulator (4H-SiCOI) platform. By carrying out micro-photoluminescence measurements at room temperature, we show that the microdisk resonators support whispering-gallery modes (WGMs) with quality factors up to $5.25 \times {{10}^3}$ and mode volumes down to $2.61 \times {(\lambda /n)^3}$ at the visible and near-infrared wavelengths. Moreover, the demonstrated wavelength-sized microdisk resonators exhibit WGMs whose resonant wavelengths are compatible with the zero-phonon lines of silicon related spin defects in 4H-SiCOI, making them a promising candidate for applications in cavity quantum electrodynamics and integrated quantum photonic circuits.

© 2021 Optical Society of America

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Supplementary Material (1)

NameDescription
Supplement 1       Supplemental information for optical setup, analysis of cavity loss.

Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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