Abstract
Digital manufacturing technology meets the needs of today’s technological development. However, the post-processing is essential for some digital fabrication methods, such as annealing and ultraviolet (UV) exposure. Femtosecond laser direct writing (FsLDW) has gained considerable attention, because it is a non-photolithographic, non-vacuum, and no heat fabrication method. The photodetectors based on a semiconductor microwire were fabricated via FsLDW. Finally, the responsivity of the fabricated photodetectors based on zinc oxide (ZnO), titanium dioxide (${\rm TiO}_2$), and tin oxide (${\rm SnO}_2$) can reach 14.27, 1.3, and 81 A/W, respectively. The enhanced performance is attributed to the rough and porous surface of ZnO, ${\rm TiO}_2$, and ${\rm SnO}_2$ microwires. The whole preparation process is realized by the programmed control femtosecond laser scanning path. This Letter demonstrates that the fabrication method has potential in the digital manufacturing of high-performance UV photodetectors.
© 2021 Optical Society of America
Full Article | PDF ArticleMore Like This
Shuyu Liang and Hong Xia
Opt. Lett. 46(24) 6075-6078 (2021)
Chen Chen, Ying Wang, Han Liu, Yubin Deng, Xun Wu, Changrui Liao, Xiaoyu Weng, Liwei Liu, Junle Qu, and Yiping Wang
Opt. Lett. 48(24) 6573-6576 (2023)
Li Ren, Kunpeng Gao, Qiuhong Tan, Chen Qing, Qianjin Wang, Peizhi Yang, and Yingkai Liu
Appl. Opt. 60(28) 8896-8903 (2021)