Abstract

We demonstrate, to the best of our knowledge, the first high-${Q}$ silicon carbide (SiC) integrated photonic sensor based on slot-ring resonators on a 3C-SiC-on-insulator (SiCOI) platform. We experimentally demonstrate an intrinsic ${Q}$ of 17,400 at around 1310 nm wavelength for a slot-ring resonator with 40 µm radius with water cladding. By applying different concentrations of a sodium chloride (NaCl) solution that covers the devices, measured bulk sensitivities of 264–300 nm/RIU (refractive index unit) are achieved in the slot-ring resonator with a 400–450 nm rail width and a 100–200 nm slot width. The device performance for biomolecular layer sensing (BMLS) is proved by the detection of the cardiac biomarker troponin with 248–322 pm/nm surface sensitivity. The reported slot-ring resonators can be of great interest for diverse sensing applications from visible to infrared wavelengths.

© 2021 Optical Society of America

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