Abstract

The design, fabrication, and characterization of low-loss ultra-compact bends in high-index (${n} = {3.1}$ at $\lambda = {1550}\;{\rm nm}$) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of ${65} \times {65}\;\unicode{x00B5}{{\rm m}^2}$, having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of $8\;{\rm mW}/\pi$ and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.

© 2021 Optical Society of America

Energy-efficient thermo-optic silicon phase shifter with well-balanced overall performance

Huaqing Qiu, Yong Liu, Chao Luan, Deming Kong, Xiaowei Guan, Yunhong Ding, and Hao Hu
Opt. Lett. 45(17) 4806-4809 (2020)

Demonstration of the DC-Kerr effect in silicon-rich nitride

Alex Friedman, Hani Nejadriahi, Rajat Sharma, and Yeshaiahu Fainman
Opt. Lett. 46(17) 4236-4239 (2021)

Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

Pierre Edinger, Alain Yuji Takabayashi, Carlos Errando-Herranz, Umar Khan, Hamed Sattari, Peter Verheyen, Wim Bogaerts, Niels Quack, and Kristinn B. Gylfason
Opt. Lett. 46(22) 5671-5674 (2021)

Thermo-optic properties of silicon-rich silicon nitride for on-chip applications

Hani Nejadriahi, Alex Friedman, Rajat Sharma, Steve Pappert, Yeshaiahu Fainman, and Paul Yu
Opt. Express 28(17) 24951-24960 (2020)

Thermo-optic coefficient of PECVD silicon-rich silicon nitride

Natale G. Pruiti, Charalambos Klitis, Christopher Gough, Stuart May, and Marc Sorel
Opt. Lett. 45(22) 6242-6245 (2020)