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3D high precision laser printing of a flat nanofocalizer for subwavelength light spot array

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Abstract

Here, we demonstrate a flat nanofocalizer for converging light field into a uniform subwavelength light spot array based on the fractional Talbot effect by developing a direct laser writing technique with 3D fabrication precision. The fractional Talbot effect endows the device with the merits of high compression ratio and modular design capability for transforming a plane wave into arrayed light focal spots. By combining a synergistic laser printing technique, we introduce a buffer layer for improving the fabrication precision of structural height in favor of accurately manipulating the phase delay. For a given light wavelength at 750 nm, by precisely producing a nanofocalizer consisting of periodic unit elements with the dimensions of ${300}\;({\rm width}) \times {600}\;({\rm length}) \times {585}\;({\rm height})\;{\rm nm}$, we have achieved ${5} \times {6}$ light spot array with modular design, while the full width at half-maximum of a single focused light spot can be reduced to $\sim 0.82 \lambda$. Our research may pave the way for realizing subwavelength optical devices capable of being readily integrated to existing optical systems.

© 2021 Optical Society of America

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