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Integrated optical chip for a high-resolution, single-resonance-mode x-ray monochromator system

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Abstract

An integrated optical chip that minimizes the size of the energy-tuning single-resonance-mode x-ray monochromator system into a $3\;{\rm{cm}} \times 5\;{\rm{cm}}$ silicon wafer is proposed. A Fabry–Perot x-ray resonator and two back-reflecting Si mirrors are employed on the wafer as the optical components, where Si(12 4 0) back reflection is used for both Fabry–Perot resonance and re-diffraction of the x-ray beams from the resonator in the incident direction. We can achieve an energy bandwidth of 3.4 meV in single-mode x rays and tune the energy by temperature variation. Such Si chips can be readily employed at the synchrotron beamlines and conventional x-ray laboratories for high-resolution investigations.

© 2021 Optical Society of America

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