Abstract
This work proposes a novel scheme for a back focal plane (BFP)-type apertometer. The basic concept is to generate “multi-references” on BFP via the grating projection, which shows superiorities in two aspects: (1) a wider measurement range for both dry and immersion objectives; (2) higher accuracy via self-calibration of multi-references. To the best of our knowledge, this is the first approach and setup to allow the measurement of objectives with NA across unity via a “virtual” Fourier plane. It is also the first time to demonstrate a self-calibrated BFP-type apertometer with multi-references. All the involved concepts are experimentally verified.
© 2021 Optical Society of America
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