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Abstract
We developed a simple multi-foci-shaped femtosecond pulsed (MFSFP) method for processing circular cross section waveguides in transparent materials. With this flexible processing method, the focus energy distribution can be designed freely and arbitrarily, and single-mode waveguides with cross section circularity better than 96.0% were achieved. The mode shape difference (1.93%) of circular waveguides is smaller than the difference (7.01%) of normal elliptical waveguides. The coupling abilities of the two kinds of waveguides were investigated with three-dimensional (3D) directional couplers in both experiments and theoretical simulations. The coupling coefficient difference of circular waveguides in vertical and horizontal coupling directions was ${\sim}{0.01}\;{{\rm{mm}}^{- 1}}$, which was smaller than ${0.33}\;{{\rm{mm}}^{- 1}}$ of normal waveguides. The circular symmetric waveguides will play an important role in large-scale high-intensity 3D photonic integrated circuits.
© 2021 Optical Society of America
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