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Maskless fabrication of plasmonic metasurfaces in polymer film using a spatial light modulator

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Abstract

We demonstrate a high-speed optical technique to fabricate plasmonic metasurfaces in a polymer film. The technique is based on a programmable spatial light modulator, which is used to spatially control the photoreduction sites of gold ions in a polyvinyl alcohol film doped with a gold precursor. After irradiation, annealing was used to induce the growth of nanoparticles, producing plasmonic microstructures. Using a 473 nm excitation wavelength, microscopic plasmonic gratings, and meta-atom arrays with arbitrary orientations, an effective nanostructure size of ${\sim}{{700}}\;{\rm{nm}}$ and constituent nanoparticles with average size of ${\sim}{{37}}\;{\rm{nm}}$ were created. The technique enables a cost-effective and straightforward light-based approach to fabricate plasmonic metasurfaces with tunable properties.

© 2021 Optical Society of America

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