Abstract

Phase measuring deflectometry is a powerful measuring method of complex optical surfaces that captures the reflected fringe images associated with a displaying screen and calculates the normal vectors of the surface under test (SUT) accordingly. The captured images are usually set conjugate to the SUT, which in turn makes the screen defocused. As a result, the blurring effect caused by the defocus and aberrations of the off-axis catadioptric imaging system can severely degrade the phases solved from the blurred images. In order to correct the phase errors, the space-variant point spread functions (PSFs) are modeled using a skew-normal function. The phase bias is estimated by forward convolution between the captured images and the PSF models. Demonstrated with a highly curved aspheric surface, the measurement accuracy can be improved by three times.

© 2021 Optical Society of America

Wavefront-coded phase measuring deflectometry for the all-focused measurement

Zhenqi Niu, Junhua Wang, Yuhan Tian, Zhen Wu, Chaoyang Wei, and Jianda Shao
Opt. Lett. 47(18) 4770-4773 (2022)

Infrared phase measuring deflectometry by using defocused binary fringe

Yanqing Shi, Caixia Chang, Xiaohong Liu, Nan Gao, Zhaozong Meng, and Zonghua Zhang
Opt. Lett. 46(13) 3091-3094 (2021)

Deep-learning-based deflectometry for freeform surface measurement

Jinchao Dou, Daodang Wang, Qiuye Yu, Ming Kong, Lu Liu, Xinke Xu, and Rongguang Liang
Opt. Lett. 47(1) 78-81 (2022)

Generic saturation-induced phase error correction for structured light 3D shape measurement

Ji Tan, Wenqing Su, Zhaoshui He, Yulei Bai, Bo Dong, and Shengli Xie
Opt. Lett. 47(14) 3387-3390 (2022)

Large-curvature specular surface phase measuring deflectometry with a curved screen

Cheng Liu, Zonghua Zhang, Nan Gao, and Zhaozong Meng
Opt. Express 29(26) 43327-43341 (2021)