Abstract
The coexistence of anti-vibration and a common optical path is difficult to realize in dynamic Fizeau interferometry. To address this problem, we propose a dynamic low-coherence interferometry (DLI) using a double Fizeau cavity. The DLI method is a new optical model that creatively renders both surfaces of the RM to interfere with the test surface, utilizing a low-coherence source and optical path matching to construct the common-path $p$-polarized Fizeau cavity ($p$-FC) and carrier-frequency $s$-polarized Fizeau cavity ($s$-FC). The relative tilt phases of the $s$-FC are calculated using the carrier frequency interferograms; then the final phase is retrieved with the relative tilt phases and $p$-FC interferograms. The experimental results demonstrate that the DLI method can provide high-precision phase measurement in a vibration environment.
© 2021 Optical Society of America
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