Abstract

A five-channel mode division multiplexed on-chip optical bus is designed and demonstrated on a submicron-thick InP membrane wafer bonded on a Si substrate. Dual-core adiabatic tapers are leveraged for realization of the mode (de)multiplexers. The optimized device shows low excess optical loss of maximum 0.14 dB compared to a reference waveguide and low cross talk of maximum −18.5 dB for all five channels over a broad optical bandwidth of 1510–1600 nm. High fabrication tolerance to width variations is also demonstrated, where a low excess loss of less than 1 dB and a low cross talk of less than −14 dB are maintained in the range of 1530–1585 nm, covering the C-band, when the width varies by up to 50 nm. The demonstrated results show an essential step toward a monolithic photonic layer on top of electronic chips for high-capacity on-chip optical interconnects.

© 2022 Optica Publishing Group

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