Optical-field-induced surface nanobumps in near-infrared laser direct cleaning of nanoparticles on silicon

Shuowen Zhang; Shuowen Zhang; Ling Wu; Ling Wu; Jiyong Tang; Jiyong Tang; Volodymyr S. Kovalenko; Volodymyr S. Kovalenko; Volodymyr S. Kovalenko; Lisha Fan; Lisha Fan; Jianhua Yao; Jianhua Yao; Jianhua Yao

doi:10.1364/OL.468520

Optics Letters
Vol. 47,
Issue 21,
pp. 5638-5641
(2022)
•https://doi.org/10.1364/OL.468520

Optical-field-induced surface nanobumps in near-infrared laser direct cleaning of nanoparticles on silicon

Shuowen Zhang, Ling Wu, Jiyong Tang, Volodymyr S. Kovalenko, Lisha Fan, and Jianhua Yao

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Shuowen Zhang, Ling Wu, Jiyong Tang, Volodymyr S. Kovalenko, Lisha Fan, and Jianhua Yao, "Optical-field-induced surface nanobumps in near-infrared laser direct cleaning of nanoparticles on silicon," Opt. Lett. 47, 5638-5641 (2022)

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Table of Contents Category
- Lasers and Laser Optics
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About this Article
History
- Original Manuscript: July 5, 2022
- Revised Manuscript: September 30, 2022
- Manuscript Accepted: October 1, 2022
- Published: October 25, 2022

Abstract

The evolution of surface damage in laser direct cleaning (LDC) of nanoparticulate contamination on silicon (Si) was theoretically and experimentally investigated. Nanobumps with a volcano-like shape were found in near-infrared laser cleaning of polystyrene latex nanoparticles on Si wafers. According to the finite-difference time-domain simulation and the high-resolution surface characterization, unusual particle-induced optical field enhancement in the vicinity of the interface between Si and nanoparticles is mainly responsible for the generation of volcano-like nanobumps. This work is of fundamental significance for the understanding of the laser–particle interaction during LDC and will promote the development of nanofabrication and nanoparticle cleaning applications in optics, microelectromechanical systems, and semiconductors.

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Supplement 1	Figures S1, S2, S3, S4 used in the manuscript
Visualization 1	Figures S1, S2, S3, S4 used in the manuscript.

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