Abstract

A new, to the best of our knowledge, device platform for tuning the resonance wavelength of integrated photonic resonators based on polysilicon-based micro-heaters for complementary metal-oxide semiconductor (CMOS)-foundry-based active Si photonics is demonstrated. The miniaturized micro-heater can be placed directly on the active Si layer, with a pedestal providing the optical and electrical isolation needed for the implementation of ultrafast active photonic devices such as modulators. The demonstrated devices do not require any additional modifications to the standard CMOS foundry processes. Experiments demonstrate a tuning efficiency of 0.25 nm/mW (or 42 GHz/mW) for a 5-µm-radius microdisk resonator with a loaded quality factor (Q) > 35,000. This polysilicon-based heater demonstrates a tunability of 42 GHz/mW with an average switching time of 60 µs. The proposed compact heater architecture enables it to be kept near to the optical mode, thereby providing efficient and high-speed wavelength tuning for resonant devices.

© 2022 Optical Society of America

Thermally tunable and efficient second-harmonic generation on thin-film lithium niobate with integrated micro-heater

Xiaoyue Liu, Chi Zhang, Ying Pan, Rui Ma, Xian Zhang, Mengwen Chen, Lin Liu, Zhenda Xie, Shining Zhu, Siyuan Yu, and Xinlun Cai
Opt. Lett. 47(19) 4921-4924 (2022)

Compact thermo-optic modulator based on a titanium dioxide micro-ring resonator

Hongyan Yu and Feng Qiu
Opt. Lett. 47(8) 2093-2096 (2022)

Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

Adil Masood, Marianna Pantouvaki, Danny Goossens, Guy Lepage, Peter Verheyen, Joris Van Campenhout, Philippe Absil, Dries Van Thourhout, and Wim Bogaerts
Opt. Mater. Express 4(7) 1383-1388 (2014)

Silicon photonic arrayed waveguide grating with 64 channels for the 2 µm spectral range

Yingjie Liu, Xi Wang, Yong Yao, Jiangbing Du, Qinghai Song, and Ke Xu
Opt. Lett. 47(5) 1186-1189 (2022)

Electromagnetically induced transparency with a single optomechanical microring resonator

Linhao Ren, Hao Wen, Lei Shi, and Xinliang Zhang
Opt. Lett. 47(6) 1363-1366 (2022)