Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Journal Home About Issues in Progress Current Issue All Issues Early Posting

Dynamic spectroscopic imaging ellipsometry

Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Chulmin Joo, and Robert Magnusson

Not Accessible

Your library or personal account may give you access

Abstract

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

© 2022 Optica Publishing Group

Full Article  |  PDF Article
More Like This
Robustness enhancement of dynamic spectroscopic ellipsometry by compensating temperature dependency of the monolithic polarizing interferometer

Inho Choi, Vamara Dembele, Saeid Kheiryzadehkhanghah, Gukhyeon Hwang, Benjamin Charron, Jean-Francois Masson, and Daesuk Kim
Appl. Opt. 61(26) 7653-7661 (2022)

Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer

Gukhyeon Hwang, Inho Choi, Sukhyun Choi, Saeid Kheiryzadehkhanghah, Won Chegal, Sungtae Kim, Sangjun Kim, Robert Magnusson, and Daesuk Kim
Opt. Express 31(12) 19569-19587 (2023)

Sub-second quantum cascade laser based infrared spectroscopic ellipsometry

Alexander Ebner, Robert Zimmerleiter, Christoph Cobet, Kurt Hingerl, Markus Brandstetter, and Jakob Kilgus
Opt. Lett. 44(14) 3426-3429 (2019)

View More...

Supplementary Material (1)

NameDescription
Visualization 1       3-dimensional cubic spectroscopic ellipsometric phase mapping data Delta(?,x,y) in 1 hour by using the proposed DSIE system.

Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the corresponding author upon reasonable request.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (11)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use