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Dynamic spectroscopic imaging ellipsometry

Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Chulmin Joo, and Robert Magnusson

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Abstract

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

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Supplementary Material (1)

NameDescription
Visualization 1       3-dimensional cubic spectroscopic ellipsometric phase mapping data Delta(?,x,y) in 1 hour by using the proposed DSIE system.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the corresponding author upon reasonable request.

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