Abstract

The formation mechanism of laser-induced periodic surface structures (LIPSS) has been a key to high-resolution sub-diffraction lithography or high-efficiency large-area nanotexturing. We show the evolution of LIPSS formation from a nanohole seed structure to high-spatial-frequency LIPSS by using a tightly focused and rectangular-shaped laser beam with different shape–polarization orientations. Formation of LIPSS based on light intensity distribution without invoking any long-range electromagnetic modes achieved quantitative match between modeling and experiment. Our results clearly show the entire step-like and deterministic process of LIPSS evolution based on experimental data and numerical simulations, revealing the dominant structural near-field enhancement on the ripple formation. A rectangular-shaped beam with an aspect ratio of 7:3 was used to break the symmetry of a circularly shaped focus. By azimuthally rotating the orientation of the focal spot and the polarization, it is possible to visualize the far-field effect for the initial seed structure formation and the competition between the far and near fields in the subsequent structure evolution.

© 2023 Optica Publishing Group

Formation and modulation of multi-pulse femtosecond laser-induced periodic surface structures by electromagnetic and partial differential equation simulations

Shijie Song, Peilei Zhang, Qinghua Lu, Di Wu, Haichuan Shi, Hua Yan, Zhenyu Liu, Tianzhu Sun, Hanxuan Huang, Ruifeng Li, and Qingzhao Wang
Opt. Lett. 48(17) 4570-4573 (2023)

Advanced active polymer probe for near-field optics

Hongshi Chen, Quanbo Jiang, Ali Issa, Borui Li, Dandan Ge, Safi Jradi, Jacques Lalevee, Sylvie Marguet, Regis Deturche, Christophe Couteau, Jerome Plain, and Renaud Bachelot
Opt. Lett. 48(15) 4157-4160 (2023)

Deep-subwavelength nanohole arrays embedded in nanoripples fabricated by femtosecond laser irradiation

Vanthanh Khuat, Jinhai Si, Tao Chen, and Xun Hou
Opt. Lett. 40(2) 209-212 (2015)

Terahertz metasurface for near-field beam conversion

Mingxiang Stephen Li, Rajour Tanyi Ako, Sharath Sriram, Christophe Fumeaux, and Withawat Withayachumnankul
Opt. Lett. 48(8) 2202-2205 (2023)

Controllable formation of laser-induced periodic surface structures on ZnO film by temporally shaped femtosecond laser scanning

Shaojun Wang, Lan Jiang, Weina Han, Wei Liu, Jie Hu, Suocheng Wang, and Yongfeng Lu
Opt. Lett. 45(8) 2411-2414 (2020)