Femtosecond laser printing-assisted etching tailored hard and brittle micro-convex surface

Yang Liu; Ji Huang; Bin Yin; Yunxia Ye; Misheng Liang; Xiaozhe Chen; Feifei Wang; Jingjing Zhang; Zijie Dai

doi:10.1364/OL.501146

Optics Letters
Vol. 48,
Issue 19,
pp. 5097-5100
(2023)
•https://doi.org/10.1364/OL.501146

Femtosecond laser printing-assisted etching tailored hard and brittle micro-convex surface

Yang Liu, Ji Huang, Bin Yin, Yunxia Ye, Misheng Liang, Xiaozhe Chen, Feifei Wang, Jingjing Zhang, and Zijie Dai

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Yang Liu, Ji Huang, Bin Yin, Yunxia Ye, Misheng Liang, Xiaozhe Chen, Feifei Wang, Jingjing Zhang, and Zijie Dai, "Femtosecond laser printing-assisted etching tailored hard and brittle micro-convex surface," Opt. Lett. 48, 5097-5100 (2023)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Check for updates

Abstract

We report a femtosecond laser print-assisted dry etching technology for high-efficiency, high-quality, and tailored fabricating of a micro-convex surface (MCS) on hard and brittle materials. Liquid ultraviolet curing adhesive (UVCA) was transferred from a donor substrate to a receiving substrate by femtosecond laser-induced forward transfer, and the transferred microdroplet spontaneously has a smooth surface under the action of surface tension. And then an MCS with a high-quality surface was formed on hard and brittle materials by UV curing and dry etching. The effects of laser parameters and receiving substrate surface free energy on MCS morphology were investigated. According to the variation of the numerical aperture, the two methods to change the morphology of the MCS were divided into independent/joint regulation of diameter and height. We showed that a hexagonal array containing a variety of MCS morphologies can be fabricated on a fused silica by setting the appropriate parameters. And the fabrication time of an MCS in a large-area array was only 1.1 s.

Full Article | PDF Article

More Like This

Integration of cross-scale milli/microlenses by ion beam etching and femtosecond laser modification

Jin-Yong Qi, Zhi-Yan Zhao, Zi-Jian Liu, Bao-Xu Wang, and Xue-Qing Liu
Opt. Lett. 48(10) 2752-2755 (2023)

Fresnel zone plate sculptured out of diamond by femtosecond laser for harsh environments

Peichao Wu, Xiaowen Cao, Wubo Chu, Zhihao Chen, Hongbing Yuan, Rujia Wang, Songbai Yao, Saulius Juodkazis, and Wenwu Zhang
Opt. Lett. 48(6) 1379-1382 (2023)

Ultra-smooth micro-optical components of various geometries

Xue-Qing Liu, Shuang-Ning Yang, Yun-Lu Sun, Lei Yu, Ben-Feng Bai, Qi-Dai Chen, and Hong-Bo Sun
Opt. Lett. 44(10) 2454-2457 (2019)

Previous Article Next Article

Supplementary Material (1)

Name	Description
Supplement 1	Process preparation of donor substrate and ICP etching process; the influence mechanism of silanisation; imaging of MCS and its experimental setup; morphology and position deviations distribution of MCS in the array, SEM image of the array.

Data availability

The data that support the findings of this study are available from the corresponding author.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.