Abstract
The author describes optical lithography in the context of the semiconductor industry. Past trends are evaluated and used to predict future possibilities. The economics of the semiconductor industry, and thus optical lithography, is discussed and its impact on technology development explained. Wavefront engineering seems to be the most promising approach to extending the life of optical lithography in the near future.
PDF Article
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription