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OPTICAL MEMS: HUGE POSSIBILITIES FOR LILLIPUTIAN-SIZED DEVICES

Ming C. Wu, Li Fan, and Shi-Sheng Lee

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Abstract

Recent advances in micro-electro-mechanical systems (MEMS) have made it possible to produce entire micro-optical systems in a single chip. After describing this exciting technology, micro-optical benches, XYZ stages, and fiber optic switches are explored.

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