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Detector-integrated vertical-cavity surface-emitting laser with a movable high-contrast grating mirror
Photonics Research- received 01/22/2024; accepted 04/22/2024; posted 04/22/2024; Doc. ID 519679
- Abstract: In this paper, we present a detector-integrated vertical-cavity surface-emitting laser (VCSEL) with a movable high-contrast grating (HCG) mirror in an n-i-p-i-n manner. The detector-integrated VCSEL with a movable HCG can achieve three functions, including wavelength tuning, power monitoring, and resonant-cavity-enhanced (RCE) photon detection. Currently, the device can achieve a tuning range of 27 nm at room temperature when the suspended HCG is driven by the reverse bias voltage. The n-i-p structure located at the upper part of the device can serve as an intra-cavity photodiode to monitor the output power due to the defect absorption. The RCE photon detection function of the detector-integrated VCSEL with a movable HCG is measured, and it has a peak responsivity at about 926 nm. This detector-integrated VCSEL with a movable HCG will be useful for sensing and imaging.