Lithium niobate (LN) material serves as the backbone for a wide range of applications spanning from high-speed communications to quantum optical circuits. The authors of this article report a low-energy-cost manufacture approach of microscale size LN structures for polarization state modulators with state-of-art insertion loss and electro-optic efficiency. The proposed fabrication approach utilizes a single dicing-polish step to machine single-mode LN waveguides with efficient tapers and coplanar electrodes, all of which are essential for high performance electro-optic modulators, as compared to ion-slicing technology which requires high energy consumption and more involved processing procedures. Authors further demonstrate the control of the LN birefringent properties using thickness control and laser trimming. The demonstrated processing techniques present a critical advancement towards a practical and cost-effective production of the LN photonic devices with low-yield loss and high performance.

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