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Conferences > EUVXRAY > 2024 > ETh2A > ETh2A.4

Laser-accelerator driven ultrahigh Brightness EUV/SRX sources

Bjorn Manuel Hegelich, Samuel Barber, Phil Franke, Miguel Gracia, Lance Labun, Stephen Milton, and Jeroen van Tilboerg

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Abstract

TAU Systems, Inc., is developing a laser accelerator system to generate high-energy electron beams as drivers for table-top synchrotron-like x-ray sources and compact EUV/X FEL systems for semiconductor R&D and metrology, other applications. We show for the first time >10 GeV from a laser wakefield accelerator and plans for an application center.

© 2024 The Author(s)

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