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Conferences > EUVXRAY > 2024 > ETu5A > ETu5A.3

Highly Efficient 13.5 nm Light Generation Using 2 μm Laser Driven Tin Plasma

Y. Mostafa, L. Behnke, D. J. Engels, Z. Bouza, J. Sheil, W. Ubachs, and O. O. Versolato

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Abstract

We demonstrate highly efficient 2 μm-wavelength laser-produced plasma light sources for nanolithographic applications, reaching efficiencies of up to 5%.

© 2024 The Author(s)

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