Selected Applications of Atomic Layer Deposition Dielectric Nanolaminates as Functional Optical Coatings

Adriana Szeghalmi; Michael Helgert; Robert Brunner; Mario Bretschneider; Stephan Senz; Ulrich Gösele; Mato Knez

doi:10.1364/AIOM.2009.AThB3

Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper AThB3
•https://doi.org/10.1364/AIOM.2009.AThB3

Selected Applications of Atomic Layer Deposition Dielectric Nanolaminates as Functional Optical Coatings

Adriana Szeghalmi, Michael Helgert, Robert Brunner, Mario Bretschneider, Stephan Senz, Ulrich Gösele, and Mato Knez

Advances in Optical Materials 2009

San Jose, California United States
14–15 October 2009
ISBN: 978-1-55752-878-0

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Applications of Nanophotonics (AThB)

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A. Szeghalmi, M. Helgert, R. Brunner, M. Bretschneider, S. Senz, U. Gösele, and M. Knez, "Selected Applications of Atomic Layer Deposition Dielectric Nanolaminates as Functional Optical Coatings," in Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper AThB3.

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Abstract

The paper discusses optical applications of atomic layer deposition. X-ray mirrors, antireflective coatings and bandpass filters were made for the visible spectral region. Coatings applied to two-dimensional shallow gratings produced tunable guided mode resonance filters.

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