Compact EUV & X-ray Light Sources
in Proceedings High-Brightness Sources and Light-Driven Interactions Congress
Part of Optica High-Brightness Sources and Light-Driven Interactions Congress
12–14 March 2024, Vienna, Austria
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This meeting addresses relevant applications and source concepts and technologies in the EUV through hard-ray regime. Papers cover the latest results in the development of these sources as well as descriptions of efforts to mature the technology so that they meet the requirements needed in order to transition the technology to industrial and medical applications.
Also known as: Compact EUV & X-ray Light Sources