Abstract
We report, for the first time, laser direct writing of good conducting aluminum interconnects. These lines were deposited from a metallorganic gas with a focused deep-uv beam and were directly connected to aluminum test, structures.
© 1987 Optical Society of America
PDF ArticleMore Like This
In-Situ Raman Microprobe Analysis of Direct Laser Writing
Irving P. Herman
ThB1 Lasers in Material Diagnostics (LMD) 1987
Direct writing of conductive aluminum line on aluminum nitride ceramics with TEA CO2 laser
Hiroyuki Yabe, Akihisa Takahashi, and Minoru Obara
CTuK5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1997
Laser direct-write process for fabrication of VLSI gate-array interconnects
Bruce M. McWilliams
TUS3 Conference on Lasers and Electro-Optics (CLEO:S&I) 1986