Abstract
There is a tremendous effort currently to grow thin films of the superconducting YBa2Cu3O7−x material by various techniques. The next logical step is to develop effective processing methods for patterning these films into devices. Unfortunately, wet photolithographic methods involve the use of various chemicals to which the ceramic oxide materials are very sensitive. The superconducting property of these films will be degraded or even destroyed.1,2
© 1989 Optical Society of America
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