Abstract
As implemented in commercially available equipment, reactive low voltage ion plating (RLVIP) has shown1 the capability to produce very dense, glassy, thin films (Fig. 1) with extremely smooth surfaces (as low as 0.2-nm rms roughness for 0.5-μm-thick single layers). These films lack the columnar microstructure typical of electron-beam-deposited thin films.2
© 1991 Optical Society of America
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