Abstract
An important class of spatial light modulator (SLM) is the deformable mirror device (DMD), a monolithically integrated, silicon-based array of individually addressable micromechanical mirror elements that are controlled electronically,1 Applications of DMDs include optical switching, high-definition-television projection displays, and electro-photographic printers. We have modeled the operation of the DMD and used a fast, high-resolution, and calibratable method2 to measure its optical-beam-deflection characteristics.
© 1991 Optical Society of America
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