Abstract
Efforts to increase excimer lasers' pulse width and efficiency have been successful only for the XeCl laser.1,2 The efficiency of long-pulse KrF Laser (250 nm) is low, and for the other short wavelength excitner lasers ArCl (175 nm), ArF (193 nm), and KrCl (222 nm), only short optical pulses (10-30 ns) have been obtained to date.
© 1993 Optical Society of America
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