Abstract
Fabrication of surface-relief submicron gratings on semiconductor, quartz, and polymer materials is of interest in numerous applications such as distributed feedback lasers, wavelength division de-multi-plexers, holographic optical elements, surface acoustic wave directional-couplers, and physical and chemical sensors. Excimer lasers offer several advantages in patterning such gratings, their high fluence making possible single-step processing for high through-put and their short wavelength offering submicron line spacing.
© 1994 Optical Society of America
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