Fabrication of AlxGa1-xP waveguides with unusually smooth side walls for nonlinear optical applications

S. Wu; W. G. Bi; W. G. Bi; R. P. Espindola; M. K. Udo; C. W. Tu; C. W. Tu; S. T. Ho

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1994),
paper CThI28

Fabrication of Al_xGa_1-xP waveguides with unusually smooth side walls for nonlinear optical applications

S. Wu, W. G. Bi, R. P. Espindola, M. K. Udo, C. W. Tu, and S. T. Ho

Conference on Lasers and Electro-Optics 1994

Anaheim, California United States
8–13 May 1994
ISBN: 1-55752-341-X

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Poster Session 3 (CThI)

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S. Wu, W. G. Bi, R. P. Espindola, M. K. Udo, C. W. Tu, and S. T. Ho, "Fabrication of AlxGa1-xP waveguides with unusually smooth side walls for nonlinear optical applications," in Conference on Lasers and Electro-Optics, T. Baer, A. Smirl, J. Bowers, and D. Miller, eds., Vol. 8 of OSA Technical Digest (Optica Publishing Group, 1994), paper CThI28.

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Abstract

In rib optical waveguides, scattering loss is strongly dependent on rib height and the degree of smoothness of the rib's side walls. A successful fabrication of rib waveguides requires an etchant that can give smooth side walls, has slow lateral etch rate, and can provide reproducible results. To our knowledge, the fabrication of waveguides with AI_xGa_1-xP/GaP material has not been investigated much or at all.

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