Abstract
Ablation of fluorocarbon films such as polytetrafluoroethylene (PTFE) is difficult since their absorption starts in the vacuum ultraviolet (VUV) region. In the early work using nanosecond ultraviolet (UV) lasers, the films were ablated with a large threshold fluence and the ablated peripherals were not in good condition, mainly due to their small absorption in the UV.
© 1994 Optical Society of America
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