Abstract
Wafer fusion allows novel devices to be made that use combinations of materials that are not lattice matched and are thicker than the conventional limit for dislocation formation.
© 1997 Optical Society of America
PDF ArticleWafer fusion allows novel devices to be made that use combinations of materials that are not lattice matched and are thicker than the conventional limit for dislocation formation.
© 1997 Optical Society of America
PDF Article