Femtosecond laser micromachining of Si-on-Si02 for photonic crystal fabrication

M. Li; X. Liu

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2000),
paper CFD1

Femtosecond laser micromachining of Si-on-Si0₂ for photonic crystal fabrication

M. Li and X. Liu

Conference on Lasers and Electro-Optics 2000

San Francisco, California United States
7–11 May 2000
ISBN: 1-55752-634-6

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Laser Micromachining: 1 (CFD)

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M. Li and X. Liu, "Femtosecond laser micromachining of Si-on-Si02 for photonic crystal fabrication," in Conference on Lasers and Electro-Optics, S. Brueck, R. Fields, M. Fejer, and F. Leonberger, eds., OSA Technical Digest (Optica Publishing Group, 2000), paper CFD1.

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Abstract

Photolithographic fabrication of photonic crystals in semiconductors has already been reported in the literature.

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