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Conferences > CLEO > 2004 > CThAA > CThAA7
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CThAA7

Growth of diamond-like films at room temperature on Si and III-V materials

Renato Bugge and Björn Ove Fimland

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Abstract

A new method to grow diamond-like films was used on Si and in III-V optoelectronic components. Room temperature deposition of amorphous-like films with refractive index of 2.24 was done on and around AlGaAsSb waveguides.

© 2004 Optical Society of America

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