Abstract
As an unique terahertz application, we have been developing a laser terahertz emission microscope (LTEM) for not only a study of basic science but also industrial application such as an inspection tool for semiconductor integrated circuits. In order to establish high resolution system, we employed a high-refractive solid immersion lens and a beam expander in LTEM system, by which a focused beam spot size can be minimized effectively. Using the modified LTEM, nondestructive terahertz emission images of samples patterned as line-and-space structure on InP was obtained with a spatial resolution better than 1.5 µm.
© 2008 Optical Society of America
PDF ArticleMore Like This
Ryotaro Inoue, Naotsugu Uchida, and Masayoshi Tonouchi
CMLL5 Conference on Lasers and Electro-Optics (CLEO:S&I) 2006
Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, and Kodo Kawase
CThN5 Conference on Lasers and Electro-Optics (CLEO:S&I) 2004
Yuji Sakai, Iwao Kawayama, Hidetoshi Nakanishi, and Masayoshi Tonouchi
SM4J.6 CLEO: Science and Innovations (CLEO:S&I) 2017