Abstract
Advanced measurement tools are needed to keep pace with future generations of devices and integrated circuits (IC's) as technology pushes towards 100-nm line-widths and gigahertz operating speeds. A promising new direction is the use of scanning probe microscopes for measuring very high-speed signals. Nonlinear interactions have been exploited to achieve ultrafast time resolution with the atomic force microscope,1-3 the scanning tunneling microscope,4 and the scanning near-field optical microscope.5
© 1995 IEEE
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