Abstract
Excimer lasers have been developed at SOPRA for a long time. The first one was a model based on a development of Dr. B. GODARD at the end of 1975 (Ref. 1). Since 1987, the research project EUREKA to develop a JkW excimer laser (called VEL) last for 8 years and the participation of SOPRA was successful to get for the first time this average power in addition to the first commercial laser of 10 Joules per shot during Summer of 1992 (Ref. 2).
© 1995 IEEE
PDF ArticleMore Like This
Bruno Godard, Pierre Murer, Marc Stehle, Jean Bonnet, and Daniel Pigache
CThI1 Conference on Lasers and Electro-Optics (CLEO:S&I) 1993
Shigeyuki Takagi, Koji Kakizaki, Noboru Okamoto, Fumihiko Endo, Ken Ishikawa, and Tatumi Goto
WH4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 1995
Bruno Godard, Pierre Murer, Patrick Laborde, Marc Stehle, Jean Bonnet, and Daniel Pigache
CTuG3 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 1994