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  • The Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper WH1

VEL 15-second Generation of SOPRA’s VEL industrial excimer laser, energy up to 20J

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Abstract

Excimer lasers have been developed at SOPRA for a long time. The first one was a model based on a development of Dr. B. GODARD at the end of 1975 (Ref. 1). Since 1987, the research project EUREKA to develop a JkW excimer laser (called VEL) last for 8 years and the participation of SOPRA was successful to get for the first time this average power in addition to the first commercial laser of 10 Joules per shot during Summer of 1992 (Ref. 2).

© 1995 IEEE

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