Abstract
Surface-hybrid integration techniques using planar lightwave circuits on terraced silicon substrate1,2 are useful for constructing optical access networks. A p-i-n photodiode (PD) incorporating a waveguide (WG) structure3 is essential for these integration techniques from the point of view of direct optical coupling. However, it is difficult to obtain a wide coupling tolerance while maintaining high coupling efficiency to a single-mode fiber.
© 1995 IEEE
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