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Conferences > CLEOPR > 2001 > MB3 > MB3_3
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper MB3_3

Preparation of In2O3 and ITO films using coating photolysis process with ArF excimer laser

Tetsuo Tsuchiya, Akio Watanabe, Hiroyuki Niino, Akira Yabe, Iwao Yamaguchi, Takaaki Manabe, Toshiya Kumagai, and Susumu Mizuta

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Abstract

To prepare the In2O3 and ITO films without heat treatment, we have studied the metal acetylacetonate coating photolysis process using an ArF excimer laser. In this paper, we will report the experimental procedures and our results.

© 2001 IEEE

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