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Conferences > CLEOPR > 2009 > TuJ3 > TuJ3_1
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TuJ3_1

Nano- and micromachining of transparent materials using laser plasma soft X-Rays

Tetsuya Makimura, Shuichi Torii, Hiroyuki Niino, and Kouichi Murakami

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Abstract

Laser plasma soft X-rays were applied to fabricate nano- and microstructures on surfaces of transparent materials. The optimized X-ray optics and nano-ablation process of silica glass will be emphasized as key device and process.

© 2009 IEEE

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